diff --git a/CMakeLists.txt b/CMakeLists.txt
index c13c954..75ffc97 100644
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -1,6 +1,5 @@
 #
-# SPDX-FileCopyrightText: Copyright 2019-2023 Arm Limited and/or its affiliates <open-source-office@arm.com>
-#
+# SPDX-FileCopyrightText: Copyright 2019-2024 Arm Limited and/or its affiliates <open-source-office@arm.com>
 # SPDX-License-Identifier: Apache-2.0
 #
 # Licensed under the Apache License, Version 2.0 (the License); you may
@@ -26,8 +25,16 @@
 # Define build options
 #
 
+SET(CMSIS_VER "5" CACHE STRING "CMSIS Version")
+
 # Setup paths
-set(CMSIS_PATH "${CMAKE_CURRENT_SOURCE_DIR}/cmsis" CACHE PATH "Path to CMSIS.")
+if (${CMSIS_VER} EQUAL 5)
+    set(CMSIS_PATH "${CMAKE_CURRENT_SOURCE_DIR}/cmsis" CACHE PATH "Path to CMSIS.")
+elseif(${CMSIS_VER} EQUAL 6)
+    set(CMSIS_PATH "${CMAKE_CURRENT_SOURCE_DIR}/cmsis_6" CACHE PATH "Path to CMSIS.")
+else()
+    message(FATAL_ERROR "CMSIS_VER '${CMSIS_VER}' not supported. Should be 5 or 6.")
+endif()
 set(CMSIS_NN_PATH "${CMAKE_CURRENT_SOURCE_DIR}/cmsis-nn" CACHE PATH "Path to CMSIS-NN.")
 set(CMSIS_VIEW_PATH "${CMAKE_CURRENT_SOURCE_DIR}/cmsis-view" CACHE PATH "Path to cmsis-view.")
 set(CORE_DRIVER_PATH "${CMAKE_CURRENT_SOURCE_DIR}/core_driver" CACHE PATH "Path to core driver.")
diff --git a/cmsis.cmake b/cmsis.cmake
index f8a916f..6e1cc4f 100644
--- a/cmsis.cmake
+++ b/cmsis.cmake
@@ -1,6 +1,5 @@
 #
-# Copyright (c) 2019-2022 Arm Limited.
-#
+# Copyright (c) 2019-2022, 2024 Arm Limited.
 # SPDX-License-Identifier: Apache-2.0
 #
 # Licensed under the Apache License, Version 2.0 (the License); you may
@@ -41,27 +40,37 @@
 
 # CMSIS device
 add_library(cmsis_device INTERFACE)
-target_include_directories(cmsis_device INTERFACE ${CMSIS_PATH}/Device/ARM/${ARM_CPU}/Include)
+
+if (${CMSIS_VER} EQUAL 5)
+    cmake_path(SET CMSIS_DEVICE_PATH "${CMSIS_PATH}/Device/ARM")
+    cmake_path(SET CMSIS_DEVICE_CPU_FEATURE "${ARM_CPU}${ARM_FEATURES}")
+else()
+    cmake_path(APPEND CMSIS_PATH "Cortex_DFP/Device/" OUTPUT_VARIABLE CMSIS_DEVICE_PATH)
+    cmake_path(SET CMSIS_DEVICE_CPU_FEATURE "${ARM_CPU}")
+endif()
+
+target_include_directories(cmsis_device INTERFACE ${CMSIS_DEVICE_PATH}/${ARM_CPU}/Include)
 
 target_compile_options(cmsis_device INTERFACE
-    "$<$<COMPILE_LANGUAGE:C>:-include${ARM_CPU}${ARM_FEATURES}.h>"
-    "$<$<COMPILE_LANGUAGE:CXX>:-include${ARM_CPU}${ARM_FEATURES}.h>")
+    "$<$<COMPILE_LANGUAGE:C>:-include${CMSIS_DEVICE_CPU_FEATURE}.h>"
+    "$<$<COMPILE_LANGUAGE:CXX>:-include${CMSIS_DEVICE_CPU_FEATURE}.h>")
+
 target_link_libraries(cmsis_device INTERFACE cmsis_core)
 
 # CMSIS startup
 add_library(cmsis_startup INTERFACE)
 target_sources(cmsis_startup INTERFACE
-    ${CMSIS_PATH}/Device/ARM/${ARM_CPU}/Source/startup_${ARM_CPU}.c)
+    ${CMSIS_DEVICE_PATH}/${ARM_CPU}/Source/startup_${ARM_CPU}.c)
 
-set_source_files_properties(${CMSIS_PATH}/Device/ARM/${ARM_CPU}/Source/startup_${ARM_CPU}.c
+set_source_files_properties(${CMSIS_DEVICE_PATH}/${ARM_CPU}/Source/startup_${ARM_CPU}.c
     PROPERTIES COMPILE_FLAGS -Wno-redundant-decls)
 
-target_compile_definitions(cmsis_startup INTERFACE ${ARM_CPU}${ARM_FEATURES})
+target_compile_definitions(cmsis_startup INTERFACE ${CMSIS_DEVICE_CPU_FEATURE})
 target_link_libraries(cmsis_startup INTERFACE cmsis_device)
 
 # CMSIS system
 add_library(cmsis_system INTERFACE)
 target_sources(cmsis_system INTERFACE
-    ${CMSIS_PATH}/Device/ARM/${ARM_CPU}/Source/system_${ARM_CPU}.c)
-target_compile_definitions(cmsis_system INTERFACE ${ARM_CPU}${ARM_FEATURES})
+    ${CMSIS_DEVICE_PATH}/${ARM_CPU}/Source/system_${ARM_CPU}.c)
+target_compile_definitions(cmsis_system INTERFACE ${CMSIS_DEVICE_CPU_FEATURE})
 target_link_libraries(cmsis_system INTERFACE cmsis_startup)